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Abstract

Research & Development in Material Science

Fabrication of Single Crystal Silicon Nanomembranes

Submission: June 05, 2018;Published: June 26, 2018

DOI: 10.31031/RDMS.2018.06.000646

ISSN : 2576-8840
Volume6 Issue5

Abstract

Silicon nanomembranes are thin, free standing sheets of single or poly-crystalline silicon, typically less than a micrometer thick, with lateral dimensions exceeding the thickness by several orders of magnitude. Nanomembranes have applications in flexible electronics, pressure sensing, photonic and phononic devices, sample mounts for microscopy, windows and beam splitters for optical and x-ray scattering measurements, and as a model system to perform fundamental investigations of nanoscale phenomena. This review covers fabrication processes for creating single crystal nanomembranes from a silicon-on-insulator (SOI) wafer as the starting material.

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