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Abstract
COJ Reviews & Research
Structural Scheme Actuator for Nano Research
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Open or CloseAfonin SM*
National Research University of Electronic Technology (MIET), Russia
*Corresponding author:Afonin SM, National Research University of Electronic Technology (MIET), Russia
Submission: April 16, 2020; Published: May 28, 2020
ISSN: 2639-0590Volume2 Issue5
Abstract
We obtained the structural scheme of the electro elastic actuator in the control system for nano research. The transfer functions of the electro elastic actuator are used for the decision of the characteristics of the actuator for nano research.
Keywords: Structural scheme; Electro elastic actuator; Piezo actuator; Transfer function
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a Creative Commons Attribution 4.0 International License. Based on a work at www.crimsonpublishers.com.
Best viewed in
| Above IE 9.0 version