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Abstract

COJ Reviews & Research

Structural Scheme Actuator for Nano Research

  • Open or CloseAfonin SM*

    National Research University of Electronic Technology (MIET), Russia

    *Corresponding author:Afonin SM, National Research University of Electronic Technology (MIET), Russia

Submission: April 16, 2020; Published: May 28, 2020

DOI: 10.31031/COJRR.2020.02.000548

ISSN: 2639-0590
Volume2 Issue5

Abstract

We obtained the structural scheme of the electro elastic actuator in the control system for nano research. The transfer functions of the electro elastic actuator are used for the decision of the characteristics of the actuator for nano research.

Keywords: Structural scheme; Electro elastic actuator; Piezo actuator; Transfer function

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