Abstract

Micromachining is the technique used to fabricate 2D or 3 D structures on metals in range of micron level. There are different techniques exist in industry for manufacturing the micro components. The Micro-Electromechanical Systems (MEMS) are categorized such as photo lithography, wet and dry etching, Fusion bonding, LIGA and laser micromachining. On the other hand, due to technological growth and increased application of non-silicon-based materials in industry, Non-MEMS based techniques such as Electrochemical Machining (ECM), Electro Discharge Machining (EDM), injection moulding, stamping and extrusion employs effectively. This development in current manufacturing trend is generally recognized that micro manufacturing. The current trend headed for the miniaturizations and micromachining becomes imperative in manufacturing of micro components. In traditional and non-traditional, there are various techniques practiced in manufacturing sector for micro components production. Based on operating principals such as mechanical, thermo electric, electrochemical, chemical and biochemical method micro machining techniques are classified. In that some significant techniques are discussed in this section.

Keywords: Micromachining; Electrochemical; MEMS; EDM; ECM; Inorganic materials