Abstract

The electromagneto elastic actuator is used for precise alignment in the nanotechnology, the biotechnology, the adaptive optics. The structuralparametric models, the solution of wave equation, the generalized matrix transfer function of the electromagneto elastic actuator are determined. The dynamic and static characteristics of the actuator are obtained. The parametric structural schematic diagram and the transfer functions are determined for the control systems in the nanotechnology and the biotechnology. The structural-parametric models of the piezoactuator for the transverse, longitudinal, shift piezoelectric effects are constructed.

Keywords: Electromagneto elastic actuator; Piezoactuator; Structural parametric model; Parametric structural schematic diagram; Transfer function